Working student for recycling of polishing suspensions used in chemical mechanical polishing

Developing innovative technology solutions and bringing them to application - that is our goal at the Fraunhofer Institute for Photonic Microsystems IPMS . With our expertise in the development of photonic microsystems, related technologies including nanoelectronics and wireless communication solutions, we create - in flexible and interdisciplinary teams - technologies for innovative products in a wide range of markets such as automotive, industrial and aerospace.

Microchips can be found are all around us in almost every electronic device and appliance. Chemical Mechanical Polishing (CMP) is a necessary process in chip manufacturing and responsible for an estimated 40 % of water consumption in a chip factory while using large volumes of polishing slurries which contain oxide nanoparticles. The production of these particles is very energy intensive, and they end up in landfills after being used only once.

A promising method is to recycle the abrasive particles via ultrafiltration. The master thesis will investigate how particle properties are modified by the recycling process and relate them to polishing results on test wafers. It will support an ongoing doctoral thesis researching recycling of different slurries and its effects on CMP performance. These findings will improve the scientific understanding of slurry recycling and it’s applicability in high volume manufacturing of microchips to reduce the environmental impact of CMP.

Be part of change

• Nanoparticle suspension preparation and characterization: You systematically prepare and characterize nanoparticle suspensions in a chemical lab, focusing on samples from different stages of recycling. Your analysis encompasses chemical properties, particle size, zeta potential, and particle morphology to ensure thorough understanding and optimization.
• Cleanroom operations: You perform precise tasks in a cleanroom environment, adhering to strict cleanliness standards to maintain experimental integrity and product quality.
• Polishing experiment planning: You plan and execute polishing experiments for 300 mm test wafers using industrial polishing tools, ensuring optimal parameters and procedures for reliable results.
• Comparative slurry analysis: You compare polishing results of different particle suspensions using ellipsometry and profilometry, correlating findings with the properties of the utilized slurry/particles to improve process outcomes.
• Tool-based process optimization: You analyze and refine polishing tool operations to enhance performance and reproducibility during wafer processing.
• Data-driven characterization: You collect, analyze, and interpret data from nanoparticle suspensions and polishing experiments to support process development and material improvement.
• Documentation and reporting: You maintain detailed records of experimental setups, procedures, and results to ensure clarity, reproducibility, and effective communication of findings.
• Interdisciplinary collaboration: You work closely with chemists, engineers, and technicians to integrate experimental insights into broader research and process development efforts.

The tasks can also be implemented as part of an internship or as topic for a masters or diploma thesis .

What you contribute

• Academic Background: You have a Bachelor’s degree in Chemistry, Material Science, Nanotechnology, Physics, Engineering, Biology, or a related field, with a strong foundation in fundamental chemistry and practical wet chemistry lab experience.
• Preferred Technical Experience: You have experience with one or more of the following areas:
  • Nanoparticle Characterization:
    • Size distribution analysis using Dynamic Light Scattering (DLS)
    • Zeta potential measurement via Electrophoretic Light Scattering
    • Morphological analysis using Electron Microscopy
  • Surface and Thin-Film Characterization:
    • Ellipsometry for optical property analysis
    • Profilometry for surface topography measurements
  • Chemical Mechanical Polishing (CMP): Experience with polishing processes and slurry optimization
  • Surface Chemistry: Understanding of SiO2, Si3N4, and Si surface interactions
  • Membrane Filtration: Familiarity with filtration techniques for particle separation
• Software Proficiency: You are proficient in Microsoft Office, ensuring efficient data handling, reporting, and presentation creation.
• Laboratory Skills: You have hands-on experience in wet chemistry labs, including general pH calculations and stoichiometry, and are confident in applying these skills to experimental setups.
• Scientific Communication: You are skilled in scientific presentation and data visualization, enabling clear and impactful communication of experimental results and insights
• Language Skills: You possess very good proficiency in English (C1) and/or German (C1) for effective communication in both speech and writing.

What we offer

We offer you an exciting task and valuable insights into the methods and procedures of a modern high-tech research institute. A motivated and dynamic team awaits you in a very well-equipped research and development environment. In addition, we offer you connecting points in the context of your studies or your career entry, e.g. a topic for your thesis or the beginning of your career at Fraunhofer IPMS. We will support you!

The weekly working time is a maximum of 20 hours and is to be coordinated flexibly. The position is initially limited for 1 year. A long-term collaboration is strived. We value and promote the diversity of our employees' skills and therefore welcome all applications – regardless of age, gender, nationality, ethnic and social origin, religion, ideology, disability, sexual orientation and identity. Severely disabled persons are given preference in the event of equal suitability. Remuneration according to the general works agreement for employing assistant staff.

With its focus on developing key technologies that are vital for the future and enabling the commercial utilization of this work by business and industry, Fraunhofer plays a central role in the innovation process. As a pioneer and catalyst for groundbreaking developments and scientific excellence, Fraunhofer helps shape society now and in the future.

Ready for a change? Then apply now and make a difference! Once we have received your online application, you will receive an automatic confirmation of receipt. We will then get back to you as soon as possible and let you know what happens next.

Contact

Mr. Eric Graebe
Human Resources
Phone: +49 (0)351 8823 1505

Mr. Max Constantin Klotzsche
Specialty Department
Phone: +49 (0)351 2607 3246

Fraunhofer Institute for Photonic Microsystems IPMS

Requisition Number: 82191